Article 12315

Title of the article

CONTROL SYSTEMS AND ELEMENTS OF AN AMPLIFYING PIEZOELECTRIC ACTUATOR FOR PRECISION POSITIONING

Authors

Amel'chenko Anatoliy Grigor'evich, Chief designer of nanotechnological area, Production Association “Start” named after M. V. Protsenko (1 Mira avenue, Zarechny, Penza region, Russia), opto@bk.ru
Bardin Vitaliy Anatol'evich, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), opto@bk.ru
Vasil'ev Valeriy Anatol'evich, Doctor of engineering sciences, professor, head of sub-department of instrument engineering, Penza State University (40 Krasnaya street, Penza, Russia), opto@bk.ru

Index UDK

681.586’326:539.2

Abstract

Background. The research object is a control system of precision flexural tension piezoelectric actuator, consisting of four piezopackages, placed on a base with supports and inserted into elastic package. The research subject is the methods of compensation of hysteresis and improvement of structural elements, increasing linearness, accuracy, a range of its operational movement. The aim of the work is to develop a control system of a flexural tension piezoelectric actuator with open-loop and closed-loop feedback for multifunction testing equipment, providing movement of an object along one coordinate with nanometer resolution.
Materials and methods. Imrovement of positioning accuracy of a control system with open-loop feedback and compensation of hysteresis of piezoelectric elements were performed using the Preisach mathematical model, and closed-loop feedback - using schemes with film piezoresistive sensors of bending deformation of an elastic frame; the study of deformation processes of elastic elements of the elastic frame was performed using the finite element method.
Results. The authors developed two control systems for precise positioning on the basis of enhancing the piezoelectric actuator used in multifunctional test equipment. Also the researchers developed a computer model of the elastic frame of amplified piezoactuator, researched it, introduced bending elements in the form of notches and optimized their sizes for maximum accuracy in the maximum range of movement.
Conclusions. The developed positioning system with open-loop feedback, using the Preisach mathematical model, has a simple control scheme, providing a range of movement of 200 microns and positioning accuracy of ± 2,5 microns. The positioning system with film piezoresistive sensors of bending deformation of the elastic frame provides a range of movement of 104 microns and positioning accuracy of 12 nm.

Key words

control system, amplifiying piezoactuator, elastic frame, nano-and micro-displacements, positioning precision.

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References

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Дата создания: 28.12.2015 13:42
Дата обновления: 28.12.2015 15:58